R&D
We are a company specializing in the research and development of semiconductor equipment
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FES, EFEM
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VALVE
R&D History
| No. | Application Number | Title of the Invention | Patentee | Registration Date |
|---|---|---|---|---|
| 9 | No. 10-2217711 | Exhaust Module for Side Storage | AK Tech | 2021-02-15 |
| 8 | No. 10-2212856 | Wafer Cassette Internal Rear Gas Injection Unit in Side Storage | AK Tech | 2021-02-01 |
| 7 | No. 10-2141009 | Wafer Cassette Gas Injection Structure in Side Storage | AK Tech | 2020-07-29 |
| 6 | No. 10-2123275 | Wafer Cassette for Side Storage with Side Nozzle Unit, and Side Nozzle Unit for Wafer Cassette in Si | AK Tech | 2020-06-10 |
| 5 | No. 10-2096968 | EFEM Bottom Exhaust Side Storage, and EFEM Connected to Said Side Storage | AK Tech | 2020-03-30 |
| 4 | No. 10-2080016 | Wafer-Oriented Nitrogen Gas Injection Structure for EFEM, and EFEM Including Said Structure | AK Tech | 2020-02-27 |
| 3 | No. 10-2080015 | Gas Distribution Channel Structure for Wafer Cassette in Side Storage | AK Tech | 2020-02-27 |
| 2 | No. 10-1954671 | Side nozzle unit for a wafer cassette in side storage, and wafer cassette of side storage including the side nozzle unit | AK Tech | 2019-02-27 |
| 1 | No. 10-0925159 | Rectangular Gate Valve for Semiconductor Manufacturing | AK Tech | 2009-10-29 |
Patents
Exhaust Module for Side Storage
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Wafer Cassette Internal Rear Gas Injection Unit in Side Storage
닫기
Wafer Cassette Gas Injection Structure in Side Storage
닫기
Wafer Cassette for Side Storage with Side Nozzle Unit, and Side Nozzle Unit for Wafer Cassette in Si
닫기
EFEM Bottom Exhaust Side Storage, and EFEM Connected to Said Side Storage
닫기
Wafer-Oriented Nitrogen Gas Injection Structure for EFEM, and EFEM Including Said Structure
닫기
Gas Distribution Channel Structure for Wafer Cassette in Side Storage
닫기
Side nozzle unit for a wafer cassette in side storage, and wafer cassette of side storage including the side nozzle unit
닫기
Rectangular Gate Valve for Semiconductor Manufacturing
닫기
| No. | Application Number | Title of the Invention | Patentee | Registration Date |
|---|---|---|---|---|
| 9 | No. 10-2217711 | Exhaust Module for Side Storage | AK Tech | 2021-02-15 |
| 8 | No. 10-2212856 | Wafer Cassette Internal Rear Gas Injection Unit in Side Storage | AK Tech | 2021-02-01 |
| 7 | No. 10-2141009 | Wafer Cassette Gas Injection Structure in Side Storage | AK Tech | 2020-07-29 |
| 6 | No. 10-2123275 | Wafer Cassette for Side Storage with Side Nozzle Unit, and Side Nozzle Unit for Wafer Cassette in Si | AK Tech | 2020-06-10 |
| 5 | No. 10-2096968 | EFEM Bottom Exhaust Side Storage, and EFEM Connected to Said Side Storage | AK Tech | 2020-03-30 |
| 4 | No. 10-2080016 | Wafer-Oriented Nitrogen Gas Injection Structure for EFEM, and EFEM Including Said Structure | AK Tech | 2020-02-27 |
| 3 | No. 10-2080015 | Gas Distribution Channel Structure for Wafer Cassette in Side Storage | AK Tech | 2020-02-27 |
| 2 | No. 10-1954671 | Side nozzle unit for a wafer cassette in side storage, and wafer cassette of side storage including the side nozzle unit | AK Tech | 2019-02-27 |
| 1 | No. 10-0925159 | Rectangular Gate Valve for Semiconductor Manufacturing | AK Tech | 2009-10-29 |
Quality Certifications
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ISO 9001 :2015
Design, Development, Manufacturing, and Servicing of Semiconductor Equipment and Parts
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ISO 14001:2015
Design, Development, Manufacturing, and Servicing of Semiconductor Equipment and Parts
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ISO 45001 :2015
Design, Development, Manufacturing, and Servicing of Semiconductor Equipment and Parts