R&D
We are a company specializing in the research and development of semiconductor equipment
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FES, EFEM
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VALVE
R&D History
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Development of FES (Fume Eliminate System) – Gyeonggi Technopark Local Component Localization Support Project
- Development Results
- Prototype completed and 8 patents registered
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Next-Generation EFEM Development (Low Humidity System EFEM)
- Development Results
- Initiation of R&D Development
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Heated 3-Way Ball Valve Development
- Development Results
- Prototype development completed, prototype delivery completed, and Ø160 development initiated
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APC Valve Test System
- Development Results
- Secured testing technology
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Secured in-house technology for various valve repairs.
- Development Results
- Secured repair technology for customer-requested parts
- Semiconductor Material Development
- APC Valve Localization
Patents
Exhaust Module for Side Storage
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Wafer Cassette Internal Rear Gas Injection Unit in Side Storage
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Wafer Cassette Gas Injection Structure in Side Storage
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Wafer Cassette for Side Storage with Side Nozzle Unit, and Side Nozzle Unit for Wafer Cassette in Si
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EFEM Bottom Exhaust Side Storage, and EFEM Connected to Said Side Storage
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Wafer-Oriented Nitrogen Gas Injection Structure for EFEM, and EFEM Including Said Structure
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Gas Distribution Channel Structure for Wafer Cassette in Side Storage
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Side nozzle unit for a wafer cassette in side storage, and wafer cassette of side storage including the side nozzle unit
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Rectangular Gate Valve for Semiconductor Manufacturing
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| No. | Application Number | Title of the Invention | Patentee | Registration Date |
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| 9 | No. 10-2217711 | Exhaust Module for Side Storage | AK Tech | 2021-02-15 |
| 8 | No. 10-2212856 | Wafer Cassette Internal Rear Gas Injection Unit in Side Storage | AK Tech | 2021-02-01 |
| 7 | No. 10-2141009 | Wafer Cassette Gas Injection Structure in Side Storage | AK Tech | 2020-07-29 |
| 6 | No. 10-2123275 | Wafer Cassette for Side Storage with Side Nozzle Unit, and Side Nozzle Unit for Wafer Cassette in Si | AK Tech | 2020-06-10 |
| 5 | No. 10-2096968 | EFEM Bottom Exhaust Side Storage, and EFEM Connected to Said Side Storage | AK Tech | 2020-03-30 |
| 4 | No. 10-2080016 | Wafer-Oriented Nitrogen Gas Injection Structure for EFEM, and EFEM Including Said Structure | AK Tech | 2020-02-27 |
| 3 | No. 10-2080015 | Gas Distribution Channel Structure for Wafer Cassette in Side Storage | AK Tech | 2020-02-27 |
| 2 | No. 10-1954671 | Side nozzle unit for a wafer cassette in side storage, and wafer cassette of side storage including the side nozzle unit | AK Tech | 2019-02-27 |
| 1 | No. 10-0925159 | Rectangular Gate Valve for Semiconductor Manufacturing | AK Tech | 2009-10-29 |
Quality Certifications
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ISO 9001 :2015
Design, Development, Manufacturing, and Servicing of Semiconductor Equipment and Parts
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ISO 14001:2015
Design, Development, Manufacturing, and Servicing of Semiconductor Equipment and Parts
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ISO 45001 :2015
Design, Development, Manufacturing, and Servicing of Semiconductor Equipment and Parts